Tegam / Advanced Energy

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Advanced Energy strengthened its leadership in RF process power solutions with the acquisition of TEGAM in 2021. TEGAM's industry-leading metrology and calibration technologies contribute to the precise control and repeatability of RF power delivery in plasma etch and deposition processes.
The electronic and digital instruments of TEGAM include industry-leading RF power meters, power sensors, ohmmeters, bond meters and calibration systems, which deliver best-in-class accuracy, portability, and durability even in harsh environments.